A Two Degree of Freedom Nanopositioner with Electrothermal Actuator for Decoupled Motion

Published

August 31, 2011

Author(s)

Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta

Abstract

Building a two degree-of-freedom (2 DOF) MEMS nanopositioner with decoupled X-Y motion has been a challenge in nanopositioner design. In this paper a novel design concept on making the decoupled motion of the MEMS nanopositioner is suggested. The suggested nanopositioner has two electrothermal actuators and employs a fully nested motion platform with suspended anchors. The suggested MEMS nanopositioner is capable of delivering displacement from the electrothermal actuator to the motion platform without coupled motion between the two X-Y axes. The design concept, finite element analysis (FEA) results, fabrication procedures and the performance of the 2 DOF nanopositioner is presented. In order to test the nanopositioner moving platform decoupled motion, one actuator moves the platform by 60 μm, while the other actuator is kept at the same position. The platform position cross talk error was measured to be less than 1 μm standard deviation.

Proceedings Title

ASME 2011 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2011)

Conference Dates

August 29-31, 2011

Conference Location

Washington, DC

Pub Type

Conferences

Download Paper

Local Download

Keywords

Thermal Actuation, Nanopositioning, 2D Motion

Citation

, Y. , Dagalakis, N. and Gupta, S. (2011), A Two Degree of Freedom Nanopositioner with Electrothermal Actuator for Decoupled Motion, ASME 2011 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2011) , Washington, DC, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908777 (Accessed September 11, 2024)