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Search Publications by: Richard E Cavicchi (Fed)

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Displaying 26 - 50 of 85

Characterization System for Embedded Gas Sensor Systems-on-a-Chip

December 1, 2005
Author(s)
Muhammad Y. Afridi, Allen R. Hefner Jr., Colleen E. Hood, Richard E. Cavicchi, Stephen Semancik
A characterization system is presented for evaluating critical functions of a microhotplate-based embedded gas-sensor for system-on-a-chip applications. The system uses a virtual instrument interface to control parts-per-billion (ppb) gas concentration

Restructuring of Tungsten Thin Films Into Nanowires and Hollow Square Cross-Section Microducts

November 1, 2005
Author(s)
P. M. Parthangal, Richard E. Cavicchi, Christopher B. Montgomery, Shirley Turner, Michael R. Zachariah
We report on the growth of nanowires and unusual hollow microducts of tungsten by thermal treatment of tungsten films in a RF H2/Ar plasma at temperatures between 550-620 C. Nanowires with diameters of 10-30 nm and lengths between 50-300 nm were formed

Chemical Warfare Agent Detection Using MEMS Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White V, M W. Ellzy, K B. Sumpter, Stephen Semancik
Chemical sensors capable of accurate detection of trace quantities of chemical warfare (CW) agents would provide a potent tool for perimeter security, treaty verification, battlefield threat detection, and the protection of civilians in public places

Chemical Warfare Agent Detection Using MEMS-Compatible Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White, M W. Ellzy, K B. Sumpter, Stephen Semancik
Microsensors have been fabricated consisting of TiO2 and SnO2 sensing films prepared by chemical vapor deposition (CVD) on MEMS- (micro-electromechanical systems) compatible array platforms. Response measurements from these devices to the CW agents GA

Micro-Differential Scanning Calorimeter for Combustible Gas Sensing

January 1, 2004
Author(s)
Richard E. Cavicchi, G Poirier, N H. Tea, Muhammad Y. Afridi, David W. Berning, Allen R. Hefner Jr., John S. Suehle, Michael Gaitan, Stephen Semancik, Christopher B. Montgomery
A micron-scale differential scanning calorimeter (mDSC) has been produced on a silicon chip allowing for microscopic differential scanning calorimetry measurements on small samples. The device consists of a suspended rectangular microhotplate with sample

Effect of Surface Wettability on Fast Transient Microboiling Behavior

July 22, 2003
Author(s)
O C. Thomas, Richard E. Cavicchi, Michael J. Tarlov
Microboiling events associated with the fast transient heating of a micrometer-scale metallic thin film heater immersed in water have been studied. The effect of surface properties on the microboiling transients was examined by modifying heater surfaces

Artificial Neural Networks Methods Applied to Conductometric Microhotplate Data for the Identification of the Type and Relative Concentration of Chemical Warfare Agents

April 1, 2003
Author(s)
Zvi Boger, Douglas C. Meier, Richard E. Cavicchi, Stephen Semancik
Response data from microhotplate (MHP) sensor arrays were measured for various chemical warfare (CW) agents at several concentrations. Efficient large-scale artificial neural networks (ANN) modeling has been evaluated as a method for the classification and

Temperature-Controlled MEMS Chemical Microsensors

March 13, 2003
Author(s)
Stephen Semancik, Richard E. Cavicchi, Douglas C. Meier, C J. Taylor, N O. Savage, M C. Wheeler
This paper describes MEMS microheater structures that have been employed in the development of chemical (gas) microsensors and other microanalytical components, such as preconcentrators and filters/separators. The role of microscale temperature control is

A Monolithic CMOS Microhotplate-based Gas Sensor System

December 1, 2002
Author(s)
Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, David W. Berning, Allen R. Hefner Jr., Richard E. Cavicchi, Stephen Semancik, C B. Montgomery, C J. Taylor
A monolithic CMOS microhotplate-based conductance type gas sensor system is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time

A Monolithic Implementation of Interface Circuitry for CMOS Compatible Gas-Sensor System

July 1, 2002
Author(s)
Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, David W. Berning, Allen R. Hefner Jr., Stephen Semancik, Richard E. Cavicchi
A monolithic CMOS micro-gas-sensor system, designed and fabricated in a standard CMOS process, is described. The gas-sensor system incorporates an array of four microhotplate-based gas-sensing structures. The system utilizes a thin film of tin-oxide (SnO 2

MEMS Device Platforms as Research Tools for Developing Improved Sensing Films

February 1, 2002
Author(s)
C J. Taylor, Richard E. Cavicchi, Stephen Semancik
Gas sensing characteristics of metal oxide films are dependent on the preparation method used in their fabrication. To optimize sensing film performance, one must understand how processing parameters influence composition andmicrostructure, and then

Sol-Gel Materials for Gas Phase Sensing Using Microhotplate Arrays

February 1, 2002
Author(s)
N O. Savage, Richard E. Cavicchi, Michael J. Tarlov, Stephen Semancik, J Greg Gillen
Sol-gel chemistry is used to create suspensions (sols) of small particles of materials such as metal oxides. These suspensions can be dried to a gel or powder or used in the sol form for coatings and thin films. One promising application of sol-gel derived

Micromachined Arrays as Sensor Platforms and Materials Research Tools

November 27, 2001
Author(s)
Stephen Semancik, Richard E. Cavicchi
We describe temperature-controlled elements called microhotplates which are formed by micromachining Si, as well as thin film deposition methods and interfacial phenomena, utilized to create low power, application-tunable microdevices for analyzing gases

Implementation of CMOS Compatible Conductance-based Micro-Gas-Sensor System

August 28, 2001
Author(s)
Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, Jason E. Tiffany, Richard E. Cavicchi
A CMOS compatible micro-gas sensor system was designed and fabricated in a standard CMOS process through MOSIS. This chip was post-processed to create microhotplates using bulk micro-machining techniques. Tin-oxide-sensing films were grown over post