Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Restructuring of Tungsten Thin Films Into Nanowires and Hollow Square Cross-Section Microducts

Published

Author(s)

P. M. Parthangal, Richard E. Cavicchi, Christopher B. Montgomery, Shirley Turner, Michael R. Zachariah

Abstract

We report on the growth of nanowires and unusual hollow microducts of tungsten by thermal treatment of tungsten films in a RF H2/Ar plasma at temperatures between 550-620 C. Nanowires with diameters of 10-30 nm and lengths between 50-300 nm were formed directly from the tungsten film, while under certain specific operating conditions hollow microducts having edge lengths 0.5 m and lengths between 10-200 m were observed. Presence of a reducing gas like H2 was crucial in growing these nanostructures. Preferential restructuring of the film surface into nanowires or microducts appears to be significantly influenced by the rate of mass-transfer of H2 to the surface. We also give an example of the gas sensing capabilities of tungsten nanowires.
Citation
Journal of Materials Research
Volume
20
Issue
No. 11

Keywords

hollow square microducts, nanowires, tungsten

Citation

Parthangal, P. , Cavicchi, R. , Montgomery, C. , Turner, S. and Zachariah, M. (2005), Restructuring of Tungsten Thin Films Into Nanowires and Hollow Square Cross-Section Microducts, Journal of Materials Research, [online], https://doi.org/10.1557/Jmr.2005.0373, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830917 (Accessed May 17, 2022)
Created October 31, 2005, Updated October 12, 2021