Restructuring of Tungsten Thin Films Into Nanowires and Hollow Square Cross-Section Microducts

Published

November 1, 2005

Author(s)

P. M. Parthangal, Richard E. Cavicchi, Christopher B. Montgomery, Shirley Turner, Michael R. Zachariah

Abstract

We report on the growth of nanowires and unusual hollow microducts of tungsten by thermal treatment of tungsten films in a RF H2/Ar plasma at temperatures between 550-620 C. Nanowires with diameters of 10-30 nm and lengths between 50-300 nm were formed directly from the tungsten film, while under certain specific operating conditions hollow microducts having edge lengths 0.5 m and lengths between 10-200 m were observed. Presence of a reducing gas like H2 was crucial in growing these nanostructures. Preferential restructuring of the film surface into nanowires or microducts appears to be significantly influenced by the rate of mass-transfer of H2 to the surface. We also give an example of the gas sensing capabilities of tungsten nanowires.

Citation

Journal of Materials Research

Volume

20

Issue

No. 11

Pub Type

Journals

Download Paper

https://doi.org/10.1557/Jmr.2005.0373

Local Download

Keywords

hollow square microducts, nanowires, tungsten

Citation

Parthangal, P. , Cavicchi, R. , Montgomery, C. , Turner, S. and Zachariah, M. (2005), Restructuring of Tungsten Thin Films Into Nanowires and Hollow Square Cross-Section Microducts, Journal of Materials Research, [online], https://doi.org/10.1557/Jmr.2005.0373, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830917 (Accessed October 10, 2025)