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Micromachined Arrays as Sensor Platforms and Materials Research Tools

Published

Author(s)

Stephen Semancik, Richard E. Cavicchi

Abstract

We describe temperature-controlled elements called microhotplates which are formed by micromachining Si, as well as thin film deposition methods and interfacial phenomena, utilized to create low power, application-tunable microdevices for analyzing gases and vapors. We emphasize the adaptability of the MEMS microhotplate platforms for performing varied temperature-dependent functions, and also illustrate how microarrays can be used as research tools for efficient materials processing / property studies and investigations of transient surface effects.
Citation
Proceedings of the 3rd International Aviation Security Technology Symposium

Keywords

chemical microsensor, conductance, MEMS, metals, microhotplate, micromachining, microscale research platform, oxides, semiconducting oxide

Citation

Semancik, S. and Cavicchi, R. (2001), Micromachined Arrays as Sensor Platforms and Materials Research Tools, Proceedings of the 3rd International Aviation Security Technology Symposium (Accessed May 22, 2024)

Issues

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Created November 27, 2001, Updated February 17, 2017