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Correlation of Chemisorption and Electronic Effects for Metal/Oxide Interfaces: Transducing Principles for Temperature-Programmed Gas Microsensors

Published

Author(s)

Stephen Semancik, Richard E. Cavicchi, T. J. McAvoy

Abstract

This presentation describes a research project whose objective is to produce, and demonstrate the utility of, a scientific database for oxide conductometric sensing materials. The database would relate materials performance (sensitivity, selectivity and stability) to composition, microstructure and temperature in the films. This information and the capabilities derived from it would be applied to developing a robust, low cost and application-tunable chemical monitoring technology based on micromachined platforms for DOE and other uses. The presentation includes descriptions of microhotplate arrays, microscale materials processing, films performance studies, signal processing, and transduction priciples.
Citation
DOE Environmental Management Science Program Poster Website

Keywords

arrays, combinatorial methods, conductance, environmental monitoring, gas microsensor, micromachining, semiconducting oxide, silicon, tin oxide

Citation

Semancik, S. , Cavicchi, R. and McAvoy, T. (2001), Correlation of Chemisorption and Electronic Effects for Metal/Oxide Interfaces: Transducing Principles for Temperature-Programmed Gas Microsensors, DOE Environmental Management Science Program Poster Website (Accessed May 17, 2024)

Issues

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Created December 21, 2001, Updated February 19, 2017