Correlation of Chemisorption and Electronic Effects for Metal/Oxide Interfaces: Transducing Principles for Temperature-Programmed Gas Microsensors
Stephen Semancik, Richard E. Cavicchi, T. J. McAvoy
This presentation describes a research project whose objective is to produce, and demonstrate the utility of, a scientific database for oxide conductometric sensing materials. The database would relate materials performance (sensitivity, selectivity and stability) to composition, microstructure and temperature in the films. This information and the capabilities derived from it would be applied to developing a robust, low cost and application-tunable chemical monitoring technology based on micromachined platforms for DOE and other uses. The presentation includes descriptions of microhotplate arrays, microscale materials processing, films performance studies, signal processing, and transduction priciples.
DOE Environmental Management Science Program Poster Website
arrays, combinatorial methods, conductance, environmental monitoring, gas microsensor, micromachining, semiconducting oxide, silicon, tin oxide
, Cavicchi, R.
and McAvoy, T.
Correlation of Chemisorption and Electronic Effects for Metal/Oxide Interfaces: Transducing Principles for Temperature-Programmed Gas Microsensors, DOE Environmental Management Science Program Poster Website
(Accessed December 9, 2023)