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Temperature-Controlled MEMS Chemical Microsensors



Stephen Semancik, Richard E. Cavicchi, Douglas C. Meier, C J. Taylor, N O. Savage, M C. Wheeler


This paper describes MEMS microheater structures that have been employed in the development of chemical (gas) microsensors and other microanalytical components, such as preconcentrators and filters/separators. The role of microscale temperature control is emphasized in the examples provided. Temperature dependent materials processing for sensing films and preconcentrator films is illustrated. The use of both fixed temperature and temperature programmed operational modes for the microsensors are also demonstrated. It is important to note that these operational modes can increase the analytical information content from the MEMS-based devices, while also being realized at low power consumption levels. Rapid microscale temperature control is also shown to be a valuable tool in mechanistic research on sensing, preconcentration and separation.
International Chemical Sensor Workshop


conductance, desorption, gas microsensor, low power microdevice, MEMS, microhotplate array, preconcentrator, semiconducting oxides, temperature programmed sensing


Semancik, S. , Cavicchi, R. , Meier, D. , Taylor, C. , Savage, N. and Wheeler, M. (2003), Temperature-Controlled MEMS Chemical Microsensors, International Chemical Sensor Workshop (Accessed April 22, 2024)
Created March 13, 2003, Updated February 17, 2017