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Displaying 1901 - 1925 of 2193

Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab

March 1, 1998
Author(s)
H Amick, B Sennewald, E C. Teague, Brian R. Scace
This paper reports the results of the finite element analysis and in-situ testing of a large-scale (4 m x 10 m) pneumatically isolated concrete slab are reported. The slab was constructed as a design prototype for next generation metrology laboratories at

Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces

March 1, 1998
Author(s)
Egon Marx, I J. Malik, Y Strausser, T Bristow, N Poduje, J C. Stover
Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epitaxial

Tip Characterization for Scanned Probe Microscope Width Metrology

March 1, 1998
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of the

Uncertainty Analysis for Angle Calibrations Using Circle Closure

March 1, 1998
Author(s)
William T. Estler
We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously

Advances in NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, David J. Pitchure, Theodore V. Vorburger
Recent developments in standard hardness machines and microform calibration techniques have made it possible to establish a worldwide unified Rockwell hardness scale with metrological traceability. This includes the establishments of the reference

An Integrated Approach to Optimal Three Dimensional Layout and Routing

January 1, 1998
Author(s)
Simon Szykman, J Cagan, P Weisser
This paper describes the combination of previously-developed component placement and routing algorithms into an integrated computational approach to product layout optimization. Previous work introduced simulated annealing-based algorithms for optimal

Combining Interactive Exploration and Optimization for Assembly Design

January 1, 1998
Author(s)
Simon Szykman, Gerard Kim
This paper presents an integrated framework for assembly design. The framework will allow the designer to represent knowledge about the design process and constraints as well as information about the artifact being designed, design history and rationale

Extinction Coefficients for Dielectric and Conducting Doublets of Spheres

January 1, 1998
Author(s)
Egon Marx
The extinction cross-sections of doublets of polystyrene and carbon spheres are determined using the optical theorem. The forward scattering amplitude is computed using the single integral equation method. The extinction cross-sections of the doublets are

Image Sharpness Measurement in Scanning Electron Microscopy - Part I

January 1, 1998
Author(s)
Michael T. Postek, Andras Vladar
This study introduces the idea of the sharpness concept in relationship to the determination of scanning electron microscope (SEM) perfomance. Scanning electron microscopes are routinely used in many manufacturing environments. Fully automated or

Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope

January 1, 1998
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger
The most important industrial application of Atomic Force Microscopy (AFM) is probably the accurate measurement of geometrical dimensions of small surface structures. In order to maintain the instrument''s performance and to achieve the high accuracy often

Learning to Set Up Numerical Optimizations of Engineering Designs

January 1, 1998
Author(s)
Mark Schwabacher, T Ellman, H Hirsh
Gradient-based numerical optimization of complex engineering designs offers the promise of rapidly producing better designs. However, such methods generally assume that the objective function and constraint functions are continuous, smooth, and defined

Measurement Traceability of NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, Walter S. Liggett Jr, David J. Pitchure, Theodore V. Vorburger
A metrology-based Rockwell hardness scale is established by a standard machine and a standard diamond indenter. Both must be established through force and dimensional metrology with acceptably small measurement uncertainties. In 1994, NIST developed a

NIST Microform Calibration - How It Benefits U.S. Industry

January 1, 1998
Author(s)
Jun-Feng Song, Theodore V. Vorburger
In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measure uncertainties
Displaying 1901 - 1925 of 2193
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