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Search Publications

NIST Authors in Bold

Displaying 1701 - 1725 of 2174

Critical Dimension Metrology in the Scanning Electron Microscope

June 29, 2001
Author(s)
Michael T. Postek, Andras Vladar
Metrology is a principal enabler for the development and manufacture of current and future generations of semiconductor devices. With the potential of 130, 100 nanometer and even smaller linewidths and high aspect ratio structures, the scanning electron

Analysis of Dimensional Metrology Standards

June 1, 2001
Author(s)
Thomas R. Kramer, John Evans, Simon P. Frechette, John A. Horst, Hui-Min Huang, Elena R. Messina, Frederick M. Proctor, William G. Rippey, Harry A. Scott, Theodore V. Vorburger, Albert J. Wavering
This is an analysis of standards related to dimensional metrology, with recommendations regarding standards development. The analysis focuses on the degree to which existing and developing standards provide a complete set of non-overlapping specifications

Towards a Traceable Nanoscale Force Standard

May 1, 2001
Author(s)
Jon R. Pratt, David B. Newell, Edwin R. Williams, Douglas T. Smith, John A. Kramar
The National Institute of Standards and Technology has launched a five-year project to traceably link the International System of Units (SI) to forces between 10 -8N and 10 -2N. In this paper, we give a background and overview of this project, discuss the

The Role of Knowledge in Next-generation Product Development Systems

March 6, 2001
Author(s)
Simon Szykman, Ram D. Sriram, William Regli
Information technology has played an increasingly important role in engineering product development. Its influence over the past decade has been accelerating and its impact in the coming decade will undoubtedly be immense. This paper surveys several

A Careful Consideration of the Calibration Concept

March 1, 2001
Author(s)
Steven D. Phillips, William T. Estler, Theodore D. Doiron, K Eberhardt, M Levenson
This paper is a detailed discussion of the technical aspects of the calibration process with emphasis on the definition of the measurand, the conditions under which the calibration results are valid, and the subsequent use of the calibration results in

Shape-Sensitive Linewidth Measurement with the SEM Using a Model-Based Library

March 1, 2001
Author(s)
John S. Villarrubia, Andras Vladar, J R. Lowney, Michael T. Postek
In semiconductor electronics manufacturing, device performance often depends upon size. For example, microprocessor speed is linked to the width of transistor gates. Accurate measurement of feature width is an important but challenging problem. When a

Index of Refraction of Air

February 16, 2001
Author(s)
Jack A. Stone Jr., Jay H. Zimmerman
These Web pages are intended primarily as a computational tool that can be used to calculate the refractive index of air for a given wavelength of light and given atmospheric conditions (air temperature, pressure, and humidity). The calculations are

Documentary and Physical Standards for Surface Finish and Imperfections

February 1, 2001
Author(s)
Theodore V. Vorburger
Surface finish and imperfections are important properties of optical surfaces because they are caused by manufacturing limitations or defects and are linked to degradation of optical performance. Surface finish or surface roughness constitutes the numerous

Length and Dimensional Measurements at NIST

February 1, 2001
Author(s)
Dennis A. Swyt
This paper reports on the past, present, and future of length and dimensional measurements at NIST. It covers the evolution of the SI unit of length through its three definitions and the evolution of NBS-NIST dimensional measurement from early linescales

A Careful Consideration of the Calibration Concept

January 1, 2001
Author(s)
Steven D. Phillips, William T. Estler, Theodore D. Doiron, K Eberhardt, M. Levenson
This paper is a detailed discussion of the technical aspects of the calibration process with emphasis on the definition of the measurand, the conditions under which the calibration results are valid, and the subsequent use of the calibration results in

A Novel Artifact for Testing Large Coordinate Measuring Machines

January 1, 2001
Author(s)
Steven D. Phillips, Daniel S. Sawyer, Bruce R. Borchardt, D E. Ward, D E. Beutel
We present a high accuracy artifact useful for the evaluation of large CMMs. This artifact can be physically probed by the CMM in contrast to conventional techniques that use purely optical methods such as laser interferometers. The system can be used over

Atomic Level Surface Metrology

January 1, 2001
Author(s)
Theodore V. Vorburger, Ronald G. Dixson, Jun-Feng Song, Thomas Brian Renegar, Joseph Fu, Ndubuisi George Orji, V W. Tsai, E. C. Williams, H Edwards, D Cook, P West, R Nyffenegger
MotivationSemiconductor wafers and many types of optical elementsrequire ultra-smooth surfaces in order to functionas specifiedExamples:Laser gyro mirrors with rms roughness 0.1 nmSilicon gate oxides with thickness 3 nm,rms roughness must be significantly

Effect of Aluminum Flake Orientation on Coating Appearance

January 1, 2001
Author(s)
L Sung, Maria Nadal, M E. McKnight, Egon Marx, R Dutruc, B Laurenti
The orientation of platelet-like pigments in coatings is affected by the processing conditions resulting in appearance variations of the final product. A set of aluminum-flake pigmented coatings having different flake orientations was pre-pared using

Establishment of a Virtual / Physical Standard for Bullet Signature Measurements

January 1, 2001
Author(s)
Jun-Feng Song, Theodore V. Vorburger, M Ols
The National Integrated Ballistics Information Network (NIBIN) is currently under development by the Bureau of Alcohol, Tobacco and Firearms (ATF) and the Federal Bureau of Investigation (FBI). The National Institute of Standards and Technology (NIST) and

Establishment of a Virtual/Physical Standard for Bullet Signature Measurements

January 1, 2001
Author(s)
Jun-Feng Song, Theodore V. Vorburger, M Ols
The National Integrated Ballistics Information Network (NIBIN) is currently under development by the Bureau of Alcohol, Tobacco and Firearms (ATF) and the Federal Bureau of Investigation (FBI). The National Institute of Standards and TEchnology (NIST) and

Establishment of Measurement Traceability for NIST Standard Bullets and Casings

January 1, 2001
Author(s)
Jun-Feng Song, Theodore V. Vorburger, M Ols
The National Integrated Ballistics Information Network (NIBIN) is currently under development by the Bureau of Alcohol, Tobacco and Firearms (ATF) and the Federal Bureau of Investigation (FBI). The NIST Standard Bullets and Casings Project aims to provide

Kinematic Modeling and Analysis of a Planar Micro-Positioner

January 1, 2001
Author(s)
Nicholas G. Dagalakis, John A. Kramar, E Amatucci, Robert Bunch
The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work, the accuracies of a linear and a second-order kinematic model were evaluated for a two-dimensional

Length and Dimensional Measurement at NIST

January 1, 2001
Author(s)
Dennis A. Swyt
This paper reports on the past, present, and future of length and dimensional measurements at NIST. It covers the evolution of the SI unit of length through its three definitions and the evolution of NBS-NIST dimensional measurement from early linescales
Displaying 1701 - 1725 of 2174
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