Postek, M.
, Vladar, A.
and Larrabee, R.
(2001),
Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard, Report of Investigation
(Accessed January 25, 2025)
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Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard
Published
Author(s)
, ,
Abstract
Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small (2 rnrn x 2 rnm) diced semiconductor chip. This sample is capable of being mounted directly on to a wafer, wafer piece, or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope (SEM). The chip can also be mounted onto a 'drop-in' type wafer holder. RM 8091 is fully compatible with state-of-the-art integrated circuit technology.Citation
Report of Investigation
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Others
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Created May 10, 2001, Updated February 19, 2017