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Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard

Published

Author(s)

Michael T. Postek, Andras Vladar, Robert D. Larrabee

Abstract

Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small (2 rnrn x 2 rnm) diced semiconductor chip. This sample is capable of being mounted directly on to a wafer, wafer piece, or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope (SEM). The chip can also be mounted onto a 'drop-in' type wafer holder. RM 8091 is fully compatible with state-of-the-art integrated circuit technology.
Citation
Report of Investigation

Citation

Postek, M. , Vladar, A. and Larrabee, R. (2001), Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard, Report of Investigation (Accessed February 23, 2024)
Created May 10, 2001, Updated February 19, 2017