April 18, 2011
Author(s)
Ravikiran Attota, Ronald G. Dixson, John A. Kramar, James E. Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
… typical using Scatterometry, SEM and AFM. TSOM can be used in both reflection and transmission modes and is applicable … roughness measurements, and nanoscale movements of parts in MEMS/NEMS. Industries that could benefit include … potentially significant savings and yield improvements in manufacturing. …