3D Characterization of carbon nanotube polymer composites using Scanning Electron Microscopy and Confocal Raman Microscopy
Minhua Zhao, Rachel J. Cannara
Scanning Electron Microscopy (SEM) and Confocal Raman Microscopy (CRM) were employed to characterize the 3D state of disperison of carbon nanotubes (CNT) in a polymer matrix. First, non-destructive subsurface imaging on CNT-polymer was conducted by charge-contrast SEM imaging. 3D reconstruction on stereo-pair of SEM images was demonstrated to a depth of up to 1 µm. Second, high-throughput and depth-accurate 3-D characterization of CNT polymer composites to a depth of 30 µm was demonstrated by optimizing CRM parameters and the use of high-numerical aperture immersion lenses. While this is about two orders of magnitude deeper than possible with SEM, the spatial resolution of charge-contrast SEM is about an order of magnitude greater than that of CRM, making the two techniques complementary. Finally, these techniques can be applied broadly in nanotechnology, such as through-die overlay measurements in semiconductor manufacturing and the measurement of nanoparticles endocytosed by cells.
Nanotechnology 2014: Graphene, CNTs, Particles, Films & Composites
and Cannara, R.
3D Characterization of carbon nanotube polymer composites using Scanning Electron Microscopy and Confocal Raman Microscopy, Nanotechnology 2014: Graphene, CNTs, Particles, Films & Composites, Washington DC, DC, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915822
(Accessed November 30, 2023)