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3D Characterization of carbon nanotube polymer composites using Scanning Electron Microscopy and Confocal Raman Microscopy

Published

Author(s)

Minhua Zhao, Rachel J. Cannara

Abstract

Scanning Electron Microscopy (SEM) and Confocal Raman Microscopy (CRM) were employed to characterize the 3D state of disperison of carbon nanotubes (CNT) in a polymer matrix. First, non-destructive subsurface imaging on CNT-polymer was conducted by charge-contrast SEM imaging. 3D reconstruction on stereo-pair of SEM images was demonstrated to a depth of up to 1 µm. Second, high-throughput and depth-accurate 3-D characterization of CNT polymer composites to a depth of 30 µm was demonstrated by optimizing CRM parameters and the use of high-numerical aperture immersion lenses. While this is about two orders of magnitude deeper than possible with SEM, the spatial resolution of charge-contrast SEM is about an order of magnitude greater than that of CRM, making the two techniques complementary. Finally, these techniques can be applied broadly in nanotechnology, such as through-die overlay measurements in semiconductor manufacturing and the measurement of nanoparticles endocytosed by cells.
Proceedings Title
Nanotechnology 2014: Graphene, CNTs, Particles, Films & Composites
Volume
1
Conference Dates
June 16-18, 2014
Conference Location
Washington DC, DC
Conference Title
Nanotech 2014

Keywords

confocal Raman microscopy, scanning electron microscopy, 3D, carbon nanotube, polymer composites.

Citation

Zhao, M. and Cannara, R. (2014), 3D Characterization of carbon nanotube polymer composites using Scanning Electron Microscopy and Confocal Raman Microscopy, Nanotechnology 2014: Graphene, CNTs, Particles, Films & Composites, Washington DC, DC, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915822 (Accessed June 15, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 11, 2014, Updated February 19, 2017