May 10, 2011
Author(s)
Ronald G. Dixson, Boon Ping Ng, Craig D. McGray, Ndubuisi G. Orji, Jon C. Geist
… The National Institute of Standards and Technology (NIST) is developing a new generation of standards for calibration of CD-AFM tip width. These standards, known as single crystal critical dimension … metrology, CD, linewidth, reference measurement system, standards, calibration, traceability …