April 19, 2017
Author(s)
Gaoliang Dai, Kai Hahm, Harald Bosse, Ronald G. Dixson
… (PTB) in Germany and the National Institute of Standards and Technology (NIST) in the United States. … scanner was calibrated by a set of step height and lateral standards certified by metrological AFMs, while the effective … Dimension, linewidth, metrology, CD-AFM, tip calibration, standards, traceability, international comparison …