February 1, 2002
Author(s)
C J. Taylor, Richard E. Cavicchi, Stephen Semancik
… Gas sensing characteristics of metal oxide films are dependent on the preparation method used in … arrays as microsubstrates for CVD processing of titanium oxide and tin oxide using the single source precursors titanium(IV) … device platforms, gas sensing, MEMS, MEMS Device, metal oxide films, sensing film …