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Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces

Published

Author(s)

Jae H. Kim, S H. Ehrman, George W. Mulholland, Thomas Germer

Abstract

The polarization and intensity of light scattered by polystyrene latex (PSL) and copper spheres with diameters of approximately 100 nm depostied onto silicon substrates containing various thickness of oxide films were measured using 532 nm light. The results are compared with a theory for scattering by a sphere on a surface, originally developed by others [Physica A 137, 209 (1986)] and extended to include coatings on the substrate. Non-linear least squates fits of the theory to the data yield results that were consistent with differential mobility measurements of the particle diameter.
Citation
Applied Optics
Volume
43
Issue
No. 3

Keywords

copper, films, inspection, optics, particles, polystyrene, scattering, spheres

Citation

Kim, J. , Ehrman, S. , Mulholland, G. and Germer, T. (2004), Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces, Applied Optics (Accessed April 17, 2024)
Created December 31, 2003, Updated October 12, 2021