Kim, J.
, Ehrman, S.
, Mulholland, G.
and Germer, T.
(2004),
Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces, Applied Optics
(Accessed June 5, 2023)
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Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces
Published
Author(s)
, S H. Ehrman, ,
Abstract
The polarization and intensity of light scattered by polystyrene latex (PSL) and copper spheres with diameters of approximately 100 nm depostied onto silicon substrates containing various thickness of oxide films were measured using 532 nm light. The results are compared with a theory for scattering by a sphere on a surface, originally developed by others [Physica A 137, 209 (1986)] and extended to include coatings on the substrate. Non-linear least squates fits of the theory to the data yield results that were consistent with differential mobility measurements of the particle diameter.Citation
Applied Optics
Volume
43
Issue
No. 3
Pub Type
Journals
Keywords
copper, films, inspection, optics, particles, polystyrene, scattering, spheres
Citation
Created December 31, 2003, Updated October 12, 2021