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PUBLICATIONS

Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending

Published

Author(s)

John A. Dagata, F Perez-murano, C Martin, H Kuramochi, H Yokoyama
Citation
Journal of Applied Physics
Volume
96
Issue
No. 4
Pub Type
Journals

Keywords

nanolithography, scanning probe oxidation, silicon, space charge
Manufacturing and Metrology

Citation

Dagata, J. , Perez-murano, F. , Martin, C. , Kuramochi, H. and Yokoyama, H. (2004), Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending, Journal of Applied Physics (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created August 1, 2004, Updated February 19, 2017
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