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Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending

Published

Author(s)

John A. Dagata, F Perez-murano, C Martin, H Kuramochi, H Yokoyama
Citation
Journal of Applied Physics
Volume
96
Issue
No. 4

Keywords

nanolithography, scanning probe oxidation, silicon, space charge

Citation

Dagata, J. , Perez-murano, F. , Martin, C. , Kuramochi, H. and Yokoyama, H. (2004), Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending, Journal of Applied Physics (Accessed April 14, 2024)
Created August 1, 2004, Updated February 19, 2017