October 12, 2021
Author(s)
M A. Sahiner, Joseph Woicik, P Gao, P McKeown, Mark Croft, M Gartman, B Benapfl
… The continuous downward scaling of the complementary metal oxide semiconductor (CMOS) devices has enabled the Si-based … the evershrinking dimensions of the active device, metal-oxide-semiconductor-field-effect-transistor (MOSFET), in the … CMOS, complementary metal oxide semiconductor, HfO2, x-ray absorption fine structure, …