December 31, 2014
Author(s)
Adam V. Steele, Brenton Knuffman, Jabez J. McClelland
… We present a review of the Low Temperature Ion Source (LoTIS): its aims, design, performance data … Focused ion beam, FIB, SIMS, ion source, laser cooling, cold atom ion source, LOTIS … New Ion Source for High Precision FIB Nanomachining and Circuit …