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On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes

Published

Author(s)

Andras Vladar, Michael T. Postek, Bin Ming

Abstract

All forms of microscopy are being pushed to the limit by nanotechnology. Hence, there is a relentless quest to achieve better and better resolution with various electron and ion microscopes and to monitor and maintain these instruments to achieve the best possible performance levels. This paper discusses the NIST efforts to characterize reproducibly the resolution of scanning electron and ion microscopes.
Citation
Microscopy Today

Keywords

Helium ion microscope, metrology, sharpness, resolution, scanning electron microscopy, nanotechnology
Created March 1, 2009, Updated February 19, 2017