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On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes



Andras Vladar, Michael T. Postek, Bin Ming


All forms of microscopy are being pushed to the limit by nanotechnology. Hence, there is a relentless quest to achieve better and better resolution with various electron and ion microscopes and to monitor and maintain these instruments to achieve the best possible performance levels. This paper discusses the NIST efforts to characterize reproducibly the resolution of scanning electron and ion microscopes.
Microscopy Today


Helium ion microscope, metrology, sharpness, resolution, scanning electron microscopy, nanotechnology
Created March 1, 2009, Updated February 19, 2017