@article{32036, author = {Andras Vladar and Michael Postek and Bin Ming}, title = {On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes}, year = {2009}, month = {2009-03-01}, publisher = {Microscopy Today}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901833}, language = {en}, }