January 1, 2007
Author(s)
K J. Kim, D Moon, C J. Park, David S. Simons, J Greg Gillen, H Jin, H Kang
… different compositions were grown on Si (100) wafers by ion beam sputter deposition and the compositions were … for a CCQM pilot study because matrix effects and ion sputtering effects can be ignored for these analytical … The alloy compositions quantified by SIMS with a C60 ion source were also linear with the certified compositions. …