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James Clarke, Martin Schmidt, Ndubuisi George Orji
Imaging of photoresist cross sections in a focused ion beam (FIB)-scanning electron microscope (SEM) is demonstrated with negligible damage. An in situ chromium sputtering technique is used to deposit metal on the site of interest, replacing the
Linda D. Crown, Lisa Warfield, T Coleman, L T. Sebring
This handbook compiles uniform laws and regulations developed by the Committee on Laws and Regulations of the National Conference on Weights and Measures (NCWM). This edition contains amendments adopted by the NCWM at its annual meeting in 2007. It
Ronald G. Dixson, Ndubuisi G. Orji, James E. Potzick, Joseph Fu, Michael W. Cresswell, Richard A. Allen, S J. Smith, Anthony J. Walton
The National Institute of Standards and Technology (NIST) has a multifaceted program in AFM dimensional metrology. Two major instruments are being used for traceable measurements. The first is a custom in-house metrology AFM, called the calibrated AFM (C
Eric Langlois, Gordon A. Shaw, John A. Kramar, Jon R. Pratt, Donna C. Hurley
We describe a method to calibrate the spring constants of cantilevers for atomic force microscopy (AFM). The method makes use of a piezosensor comprised of a piezoresistive cantilever and accompanying electronics. The piezosensor was calibrated before use
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
Helium Ion Microscopy (HIM) is a new, potentially disruptive technology for nanotechnology and nanomanufacturing. This methodology presents a potentially revolutionary approach to imaging and measurements which has several potential advantages over the
Based on the cross-correlation function (CCF), a new parameter called profile difference, Ds (or topography difference for 3D), is developed for measurement and comparison of 2D profiles and 3D topographies. When Ds = 0, the two compared profiles or
Nanomanufacturing is the essential bridge between the discoveries of nanoscience and real world nanotech products and is the vehicle by which the Nation and the World will realize the promise of major technological innovation across a spectrum of products
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
Helium Ion Microscopy (HIM) is a new, potentially disruptive technology for nanotechnology and nanomanufacturing. This methodology presents a potentially revolutionary approach to imaging and measurements which has several potential advantages over the
A control chart with dynamic control limit is proposed for promoting the developing process of an uncertainty budget, and verifying the developed measurement uncertainty. The up and low dynamic control limit, 2 sd, is calculated from the updated mean,
Innovations in ceramic technologies are often driven by the discovery and introduction of a material with novel or improved behavior that enables realization of a superior component, device or system. Over the past few decades, advanced ceramic materials
Jon P. Owejan, T Trabold, David L. Jacobson, D Baker, Daniel S. Hussey, Muhammad D. Arif
An interdigitated cathode flow field was tested in-situ with neutron radiography to measure the water transport through the porous gas diffusion layer in a PEM fuel cell. Constant current density to open circuit cycles were tested and the resulting liquid
C E. Buckley, Darrin L. Dimmick, Ian Soboroff, Ellen M. Voorhees
Modern retrieval test collections are built through a process called pooling in which only a sample of the entire document set is judged for each topic. The idea behind pooling is to find enough relevant documents such that when unjudged documents are
Concurrent engineering depends on clear communication between all members of the development process. As that communication becomes more and more complex, the quality of the standards used to move and understand that information likewise becomes more and
James W. Schmidt, R Gavioso, E May, Michael R. Moldover
Using a quasi-spherical, microwave cavity resonator, we measured the refractive index of helium to deduce its molar polarizability A ε in the limit of zero density. We obtained (A ε,meas - A ε,theory)/A ε = (-1.8plus or minus} 8.4)× 10 -6, where the
Richard M. Silver, Bryan M. Barnes, Ravikiran Attota, Jay S. Jun, Michael T. Stocker, Egon Marx, Heather J. Patrick
We have developed a set of techniques, referred to as scatterfield microscopy, in which the illumination is engineered in combination with appropriately designed metrology targets. Previously we reported results from samples with sub-50 nm sized features
This paper presents a summary and analysis of a study on optical modeling for critical dimension metrology. The paper is focused on two primary elements: 1) the comparison, stability, and validity of multiple electromagnetic scattering models and 2) a
The measurement of forces from piconewtons to millinewtons is an area of interest from both an applied and pure research standpoint, however creating a link between small forces and the International System of Units (SI) has been difficult. In this work, a
Gordon A. Shaw, Koo-Hyun Chung, Bin Ming, Andras Vladar
Nickel-titanium shape-memory alloy is an interesting and technologically relevant material that can recover large amounts of mechanical strain through a thermally-activated phase transformation. Because of is unusual properties, it has been used widely for
Philippe P. Darcis, Joseph D. McColskey, Christopher N. McCowan, Thomas A. Siewert
The stable tearing behavior of X100 pipeline steel through a girth weld section was investigated using a modified double cantilever beam specimens. A test technique for direct measurement of the steady state crack tip opening angle (CTOA) criterion was
The Global Positioning System (GPS) can deliver an exceptionally accurate frequency standard to any point in the world. When we use the GPS signal to control an optical frequency comb, the comb+GPS system provides laser light with well-known frequencies
Gas-filled capacitors are being used as primary thermometers and they show promise as primary pressure standards and for measuring the Boltzmann constant. With these metrological applications in mind, we discuss the advantages and disadvantages of audio
Theodore V. Vorburger, James H. Yen, B Bachrach, Thomas Brian Renegar, Li Ma, Hyug-Gyo Rhee, Xiaoyu Alan Zheng, Jun-Feng Song, Charles D. Foreman
This document reports on a study to determine the feasibility and utility of a national ballistics database of casing and bullet images. The purpose of such a proposed database would be to provide a reference collection of ballistic images against which
Douglas T. Smith, Gordon A. Shaw, R M. Seugling, D Xiang, Jon R. Pratt
Instrumented indentation testing (IIT), commonly referred to as nanoindentation when small forces are used, is a popular technique for determining the mechanical properties of small volumes of material. Sample preparation is relatively easy, usually
Jon R. Pratt, John A. Kramar, Gordon A. Shaw, Douglas T. Smith, John M. Moreland
We describe the design, fabrication, and calibration testing of a new piezoresistive cantilever force sensor suitable for the force calibration of atomic force microscopes in a range between tens of nanonewtons to hundreds of micronewtons. The sensor is