A Novel Parameter Proposed for 2D and 3D Topography Measurements and Comparisons
Jun-Feng Song, Theodore V. Vorburger
Based on the cross-correlation function (CCF), a new parameter called profile difference, Ds (or topography difference for 3D), is developed for measurement and comparison of 2D profiles and 3D topographies. When Ds = 0, the two compared profiles or topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at the National Institute of Standards and Technology (NIST), that includes data acquisition stations using stylus instruments and a confocal microscope, and a correlation program using the proposed parameter Ds and the cross-correlation function maximum CCFmax. This system has been used for 2D and 3D ballistics signature measurements of the NIST SRM (Standard Reference Material) 2461/2461 Standard Bullets and Casings, and received very high measurement reproducibility. It is suggested that the proposed parameter and algorithm could be generally used for measurement and comparison of surface profiles and topographies in surface metrology and other areas.
Proceedings of SPIE
August 26-30, 2007
San Diego, CA
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
cross-correlation function, standard bullet, standard casing, surface metrology, topography measurement