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A Novel Parameter Proposed for 2D and 3D Topography Measurements and Comparisons

Published

Author(s)

Jun-Feng Song, Theodore V. Vorburger

Abstract

Based on the cross-correlation function (CCF), a new parameter called profile difference, Ds (or topography difference for 3D), is developed for measurement and comparison of 2D profiles and 3D topographies.  When Ds = 0, the two compared profiles or topographies must be exactly the same (point by point).  A 2D and 3D topography measurement system was established at the National Institute of Standards and Technology (NIST), that includes data acquisition stations using stylus instruments and a confocal microscope, and a correlation program using the proposed parameter Ds and the cross-correlation function maximum CCFmax.  This system has been used for 2D and 3D ballistics signature measurements of the NIST SRM (Standard Reference Material) 2461/2461 Standard Bullets and Casings, and received very high measurement reproducibility.  It is suggested that the proposed parameter and algorithm could be generally used for measurement and comparison of surface profiles and topographies in surface metrology and other areas.
Proceedings Title
Proceedings of SPIE
Volume
6672
Conference Dates
August 26-30, 2007
Conference Location
San Diego, CA
Conference Title
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III

Keywords

cross-correlation function, standard bullet, standard casing, surface metrology, topography measurement

Citation

Song, J. and Vorburger, T. (2007), A Novel Parameter Proposed for 2D and 3D Topography Measurements and Comparisons, Proceedings of SPIE, San Diego, CA (Accessed March 3, 2024)
Created September 1, 2007, Updated February 19, 2017