@conference{95456,
  author = {Jun-Feng Song and Theodore Vorburger},
  title = {A Novel Parameter Proposed for 2D and 3D Topography Measurements and Comparisons},
  year = {2007},
  number = {6672},
  month = {2007-09-01},
  publisher = {Proceedings of SPIE, San Diego, CA},
  language = {en},
}