Focused Ion Beam Manufacturing Methods for Nickel-Titanium Shape-Memory Alloy Thin Films
Gordon A. Shaw, Koo-Hyun Chung, Bin Ming, Andras Vladar
Nickel-titanium shape-memory alloy is an interesting and technologically relevant material that can recover large amounts of mechanical strain through a thermally-activated phase transformation. Because of is unusual properties, it has been used widely for biomedical and MEMS applications. Some of these desirable properties, namely chemical inertness, and mechanical strength, make it difficult to process, however. In this study, focused ion beam (FIB) milling of nickel-titanium shape-memory alloy thin films was carried out in a scanning electron microscope (SEM). The effect of this micromachining methods on the shape memory effect was then examined using instrumented indentation. FIB milling at high energy was found to affect the material's mechanical properties near the thin film surface, and methods for minimizing this damage were explored.
Proceedings of the 2007 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
, Chung, K.
, Ming, B.
and Vladar, A.
Focused Ion Beam Manufacturing Methods for Nickel-Titanium Shape-Memory Alloy Thin Films, Proceedings of the 2007 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, Springfield, MA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824622
(Accessed September 22, 2023)