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Metrology

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Displaying 1726 - 1750 of 2718

Using uncalibrated lasers as wavelength standards

October 1, 2008
Author(s)
Jack A. Stone Jr.
The fundamental atomic physics of a gas laser transition is such that the transition frequency, or equivalently, the vacuum wavelength of the laser, cannot vary from its central value by more than a few parts in 106. The uncertainty of the gas laser

Performance Evaluation of Laser Trackers

September 15, 2008
Author(s)
Balasubramanian Muralikrishnan, Daniel S. Sawyer, Christopher J. Blackburn, Steven D. Phillips, Bruce R. Borchardt, William T. Estler
The American Society for Mechanical Engineers (ASME) recently released the ASME B89.4.19 Standard [1] on performance evaluation of spherical coordinate instruments such as laser trackers. At the National Institute of Standards and Technology (NIST), we can

Accuracy Considerations for Critical Dimension Semiconductor Metrology

September 9, 2008
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, B Bunday, J Allgair
As the size of integrated circuit features continues to decrease, the accuracy of measurements becomes more important. Due to greater emphasis on precision rather than accuracy, many of the measurements made in semiconductor fabs are not traceable to the

Through-focus Scanning and Scatterfield Optical Methods for Advanced Overlay Target Analysis

September 1, 2008
Author(s)
Ravikiran Attota, Michael T. Stocker, Richard M. Silver, Nathanael A. Heckert, Hui Zhou, Richard J. Kasica, Lei Chen, Ronald G. Dixson, Ndubuisi G. Orji, Bryan M. Barnes, Peter Lipscomb
In this paper we present overlay measurement techniques that use small overlay targets for advanced semiconductor applications. We employ two different optical methods to measure overlay using modified conventional optical microscope platforms. They are

NIST Microform Calibration System for Rockwell Hardness Standardization

August 25, 2008
Author(s)
Jun-Feng Song, Samuel R. Low III, Xiaoyu A. Zheng
In the uncertainty budget of Rockwell hardness tests, microform geometric errors of the diamond indenter are a major contributor. The microform calibration of Rockwell diamond indenters has been one of the key steps for Rockwell hardness standardization

Performance of Super-Resolution Enhancement for Flash LADAR Data

August 21, 2008
Author(s)
Tsai Hong Hong, Shuowen Hu, S. S. Young
Flash laser detection and ranging (LADAR) systems are increasingly used in robotics applications for autonomous navigation and obstacle avoidance. Their compact size, high frame rate, wide field of view, and low cost are key advantages over traditional

Measuring the Phase Transfer Function of a Phase-Shifting Interferometer

August 13, 2008
Author(s)
JiYoung Chu, Quandou (. Wang, John P. Lehan, Ulf Griesmann, Guangjun Gao
In characterizing the performance of a phase-shifting interferometer, the dependence of the measured height on the spatial frequency is rarely considered. We describe a test mirror with a special height relief that can be used to measure the height

Capillary flow meter for calibrating spinning rotor gauges

August 6, 2008
Author(s)
Robert F. Berg
This article describes a capillary flow meter whose maximum flow rate of 0.2 micromol/s (~0.2 cm3/min at ambient conditions) covers the range that is useful for calibrating spinning rotor gauges. Knowing the input pressure, output pressure, and temperature

Cellulose Nanocrystals the Next Big Nano-thing?

August 6, 2008
Author(s)
Michael T. Postek, Andras Vladar, John A. Dagata, Natalia Farkas, Bin Ming, Ronald Sabo, Theodore H. Wegner
Biomass surrounds us from the smallest alga to the largest redwood tree. Even the largest trees owe their strength to a newly-appreciated class of nanomaterials known as cellulose nanocrystals (CNC). Cellulose, the world s most abundant natural, renewable

Measurement Time and Statistics for a Noise Thermometer With a Synthetic-Noise Reference

August 1, 2008
Author(s)
David R. White, Samuel Benz, J Labenski, Sae Woo Nam, Jifeng Qu, H Rogalla, Weston L. Tew
This paper describes methods for reducing the statistical uncertainty in measurements made by noise thermometers using digital cross correlators, and in particular, for thermometers using pseudorandom noise for the reference signal. First, a discrete

Natural Gas Flow Calibration Service

August 1, 2008
Author(s)
Aaron N. Johnson
This document describes NIST's high pressure natural gas flow calibration service (NGFCS). Flow calibrations are conducted offsite at the Colorado Experimental Engineering Station Incorporated (CEESI) in Garner, Iowa. A parallel array of nine turbine meter

Simulated SEM Images for Resolution Measurement

July 30, 2008
Author(s)
Petr Cizmar, Andras Vladar, Bin Ming, Michael T. Postek
Resolution is a key performance metric, which often defines the quality of a scanning electron microscope (SEM). Traditionally, there is the subjective measurement of the distance between two points on special ''resolution'' samples and there are several

Stationary and non-stationary deformations in three-flat tests

July 7, 2008
Author(s)
Ulf Griesmann, Quandou (. Wang, Nicolas Laurenchet, Johannes A. Soons
Calibration procedures for optical reference flats of phase-shifting interferometers (three-flat tests) are critically important if flatness measurements with low uncertainty are desired. In these tests, all combinations of three flats with unknown

Topography Measurements for Determining the Decay Factors in Surface Replication

July 4, 2008
Author(s)
Jun-Feng Song, P Rubert, Xiaoyu A. Zheng, Theodore V. Vorburger
The electro-forming technique is used at National Institute of Standards and Technology (NIST) for the production of standard reference material (SRM) 2461 standard casings to support nationwide ballistics measurement traceability and measurement quality

Thermal Decomposition Kinetics of the Aviation Turbine Fuel Jet-A

July 2, 2008
Author(s)
Jason A. Widegren, Thomas J. Bruno
As part of a larger-scale thermophysical and transport property measurement project, the global decomposition kinetics of the aviation turbine fuel Jet-A was investigated. Decomposition reactions were performed at 375, 400, 425, and 450 °C in stainless

Third order Intermodulation Distortion in Film Bulk Acoustic Resonators at Resonance and Antiresonance

June 15, 2008
Author(s)
Eduard Rocas, Juan C. Collado Gomez, Jordi Mateu, Nathan D. Orloff, Alberto Padilla, Juan Callaghan, James C. Booth, Robert Aigner
This paper presents recent measurements and modeling of the third order intermodulation products of a Film Bulk Acoustic Resonator (FBAR), for a various values of frequency spacing between driving tones. The frequency dependence of voltage and current in

A New Microdevice for SI-Traceable Forces in Atomic Force Microscopy

June 2, 2008
Author(s)
Gregory W. Vogl, Jason J. Gorman, Gordon A. Shaw, Jon R. Pratt
A new self-excited micro-oscillator is proposed as a velocity standard for dissemination of nanoNewton-level forces that are traceable to the International System of Units (SI). The microfabricated oscillator is top-coated with magnetic thin films and
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