Reitsma, M.
, Gates, R.
and Cook, R.
(2009),
Torsional spring constant measurement of a T-shaped atomic force microscope cantilever, 10th International Symposium on MEMS and Nanotechnology (10th ISMAN), Albuquerque, NM, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902299
(Accessed October 15, 2024)
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Torsional spring constant measurement of a T-shaped atomic force microscope cantilever
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Abstract
We present a microfabricated atomic force microscope (AFM) cantilever that is used to calibrate AFM friction data. The T-shaped lateral force cantilever is equipped with lever-arms that facilitate the application of normal and lateral forces, allowing a calibration to be carried out in situ along with friction measurements. In this work, the torsional spring constant of a T-shaped cantilever has been measured using output data from two different AFM instrument platforms. Torsional spring constant values were found to be within 5% from one instrument to the other, demonstrating the robustness of the lateral force lever technique currently in development.Proceedings Title
10th International Symposium on MEMS and Nanotechnology (10th ISMAN)
Conference Dates
June 1-3, 2009
Conference Location
Albuquerque, NM, US
Conference Title
Society for Experimental Mechanics (SEM) International Congress & Exposition
Pub Type
Conferences
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Keywords
Atomic Force Microscopy, Calibration, Friction
Citation
Issues
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Created May 31, 2009, Updated October 12, 2021