Torsional spring constant measurement of a T-shaped atomic force microscope cantilever
Mark Reitsma, Richard S. Gates, Robert F. Cook
We present a microfabricated atomic force microscope (AFM) cantilever that is used to calibrate AFM friction data. The T-shaped lateral force cantilever is equipped with lever-arms that facilitate the application of normal and lateral forces, allowing a calibration to be carried out in situ along with friction measurements. In this work, the torsional spring constant of a T-shaped cantilever has been measured using output data from two different AFM instrument platforms. Torsional spring constant values were found to be within 5% from one instrument to the other, demonstrating the robustness of the lateral force lever technique currently in development.
10th International Symposium on MEMS and Nanotechnology (10th ISMAN)
June 1-3, 2009
Albuquerque, NM, US
Society for Experimental Mechanics (SEM) International Congress & Exposition
, Gates, R.
and Cook, R.
Torsional spring constant measurement of a T-shaped atomic force microscope cantilever, 10th International Symposium on MEMS and Nanotechnology (10th ISMAN), Albuquerque, NM, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902299
(Accessed December 10, 2023)