@conference{831471,
  author = {Mark Reitsma and Richard Gates and Robert Cook},
  title = {Torsional spring constant measurement of a T-shaped atomic force microscope cantilever},
  year = {2009},
  month = {2009-06-01 00:06:00},
  publisher = {10th International Symposium on MEMS and Nanotechnology (10th ISMAN), Albuquerque, NM, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902299},
  language = {en},
}