TY - CONF AU - Mark Reitsma AU - Richard Gates AU - Robert Cook C2 - 10th International Symposium on MEMS and Nanotechnology (10th ISMAN), Albuquerque, NM, US DA - 2009-06-01 00:06:00 LA - en PB - 10th International Symposium on MEMS and Nanotechnology (10th ISMAN), Albuquerque, NM, US PY - 2009 TI - Torsional spring constant measurement of a T-shaped atomic force microscope cantilever UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902299 ER -