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Ryan C. Nieuwendaal, Chad R. Snyder, Dean M. DeLongchamp
We report on details of molecular packing in high molar mass poly(3-hexylthiophene) (P3HT) by solid-state 13C {1H} cross-polarization magic angle spinning (CPMAS) NMR measurements. The degree of polymer order was estimated for two films of varied drying
Christopher W. Petz, Dongyue Yang, Alline Myers, Jeremey Levy, Jerrold Floro
This work examines Si overgrowth to encapsulate 3C-SiC quantum dot arrays epitaxially grown on Si substrates. Using transmission electron microscopy we show how the crystalline quality of the Si cap depends on the growth conditions. Overgrowth at 300ºC
Brent A. Sperling, William A. Kimes, James E. Maslar
Infrared spectroscopy has been widely used for in situ analysis of the gas phase during chemical vapor deposition (CVD) and atomic layer deposition (ALD). For both process monitoring and research applications, accurate determination of absorptivity is
Albert A. Talin, Andrea Centrone, Alexandra C. Ford, Michael E. Foster, Vitalie Stavila, Paul M. Haney, Robert A. Kinney, Veronika Szalai, Farid El Gabaly, Heayoung Yoon, Francois Leonard, Mark Allendorf
We report a strategy for realizing tunable electrical conductivity in MOFs in which the nanopores are infiltrated with redox-active, conjugated guest molecules. This approach is demonstrated using thin-film devices of the MOF Cu3(BTC)2 (also known as HKUST
Chukwudi A. Okoro, June W. Lau, Yaw S. Obeng, Klaus Hummler
In this work, a detailed failure analysis of the physical root cause for the increase in electrical resistance and radio-frequency (RF) transmission coefficient of through-silicon via (TSV) daisy chain was investigated. Six different failure modes were
We utilize magnetic resonance measurements to identify the fundamental atomic-scale defect structures involved in the negative bias temperature instability. In gate stacks composed of pure silicon dioxide, we find a degradation mechanism directly involving
Lin You, Emily Hitz, Jungjoon Ahn, Yaw S. Obeng, Joseph J. Kopanski
As demands in the semiconductor industry call for further miniaturization and performance enhancement of electronic systems, the traditional planar (2D) electronic interconnection and packaging technologies show their difficulties in meeting the ever
Sergio Cova, Massimo Ghioni, Mark A. Itzler, Joshua Bienfang, Alessandro Restelli
There is nowadays a widespread and growing interest in low-level light detection and imaging. This interest is driven by the need for high sensitivity in various scientific and industrial applications such as fluorescence spectroscopy in life and material
Jungjoon Ahn, Min-Seok Kang, Lin You, Joseph J. Kopanski, Sang-Mo Koo
AlGaN/GaN Schottky barrier diodes (SBDs) have received much attention for high power and high- frequency applications because of the high breakdown field in the wide band gap semiconductor. Schottky contacts with tunable barrier height (ΦB) between the
Aveek Gangopadhyay, Saugandhika Minnikanti, Darwin Reyes-Hernandez, Mulpuri V. Rao, Nathalia Peixoto
A microfabricated device comprised of a microelectrode array (MEA) and a microfluidic channel is presented here for the purpose of trapping cells using positive dielectrophoresis (DEP). Transparent indium tin oxide (ITO) electrodes are patterned in an
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Andras Vladar, Richard M. Silver, Abraham Arceo
Identifying defects in photolithographic patterning is a persistent challenge in semiconductor manufacturing. Well-established optical methods in current use are jeopardized by upcoming sub-20 nm device dimensions. Volumetric processing of focus-resolved
Koo-hyun Chung, Antony Chen, Christopher Anderton, Kiran Bhadriraju, Anne L. Plant, Brian G. Bush, Robert F. Cook, Frank W. DelRio
Frictional properties of native and fibronectin (FN)-functionalized type I collagen (COL) thin films were studied via atomic force microscopy. The COL lateral contact stiffness was dependent only on the hydration state, indicating that shear deformation
Ari D. Feldman, Richard K. Ahrenkiel, John H. Lehman
High-injection mobility reduction is examined by theory, modeling, and experimental data acquired by resonance coupled photoconductive decay (RCPCD). The ambipolar mobility is shown to reduce to zero when the constituent injection-dependent carrier
Zakariae Chbili, Pragya R. Shrestha, Jason P. Campbell, John S. Suehle, Kin P. Cheung, D. E. Ioannou
In this paper we report an unexpected improvement in the SiC DMOSFET transistor characteristics after a long temperature treatment at 150 C. The evolution of the device characteristics during a TDDB stress is compared to that after an elevated temperature
Bryan M. Barnes, Jing Qin, Hui Zhou, Richard M. Silver
Recently, a new technique called Fourier normalization has enabled the parametric fitting of optical images with multiple or even a continuum of spatial frequencies. Integral to the performance of this methodology is the characterization of the high
Frank W. DelRio, Lawrence H. Friedman, Michael S. Gaither, William A. Osborn, Robert F. Cook
Roughness scaling of three different deep reactive ion etched (DRIE) silicon surfaces is investigated using atomic force microscopy. At small distances, height-height correlations H reveal power-law behavior with equal scaling exponents for all surfaces
Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, Francois R. Goasmat
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions
Thao M. Nguyen, Julien C. Gigault, Vincent A. Hackley
The development of highly efficient asymmetric-flow field flow fractionation (A4F) methodology for biocompatible PEGylated gold nanorods (GNR) without the need for surfactants in the mobile phase is presented. We report on the potential of A4F for rapid
B. P. Geiser, Eric B. Steel, Karen T. Henry, D. Olson, T.J. Prosa
Atom probe tomography implant dose measurements are reported for National Institute of Standards and Technology Standard Reference Material 2134 (As implant). Efforts were taken to manufacture specimens with limited variation in size and shape to minimize
This study is focused on understanding the effect of thermal cycling on the signal integrity characteristics of TSV isolation liner (SiO2). The use of radio frequency (RF) signals is found to be a good metrology tool for the detection of discontinuities in
We present an approach for characterizing transistors embedded in microstrip lines formed on a thin bisbenzocyclobutene-based (BCB) monomers film at sub-millimeter-wave frequencies. We demonstrate the approach to 750 GHz and estimate the uncertainty of the
Dylan F. Williams, Phillip Corson, Sharma Jahnavi, Krishnaswamy Harish, Tai Wei, George Zacharias, Ricketts David, Watson Paul, Dacquay Eric, Voinigescu Sorin
We study and present design guidelines for thru-reflect-line vector-network-analyzer calibration kits used for characterizing circuits and transistors fabricated on silicon integrated circuits at millimeter-wave frequencies. We compare contact-pad designs
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
The design and application of a novel solar simulator based on a high-power, super-continuum laser is described in this work. The simulator light was focused to a spot approximately 8 υm in diameter, and used to create micrometer-scale spatial maps of full