Frontiers of Characterization and Metrology for Nanoelectronics: 2017

Published: March 20, 2017

Author(s)

Erik M. Secula, David G. Seiler

Abstract

The 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) has the goal of bringing together scientists and engineers interested in all aspects of the characterization and measurement technology needed for nanoelectronic materials and device research, development, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in-situ, and real-time control and monitoring. The conference summarizes major issues and provides critical reviews of important semiconductor techniques needed as the semiconductor industry continues its move to silicon nanoelectronics and beyond.
Proceedings Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2017
Conference Dates: March 20-23, 2017
Conference Location: Monterey, CA
Conference Title: 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Pub Type: Conferences
Created March 20, 2017, Updated March 10, 2017