TY - CONF AU - Erik Secula AU - David Seiler C2 - Frontiers of Characterization and Metrology for Nanoelectronics: 2017, Monterey, CA DA - 2017-03-20 LA - en PB - Frontiers of Characterization and Metrology for Nanoelectronics: 2017, Monterey, CA PY - 2017 TI - Frontiers of Characterization and Metrology for Nanoelectronics: 2017 UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923057 ER -