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NIST Pubs

Polymer Division Technical Activities - 1999

Author(s)
Eric J. Amis, B M. Fanconi
Technical activities of the Polymers Division, 854, for the 1999 fiscal year are described. The report is organized by programs: Electronic Packaging

GAMS5

Author(s)
C Doll, H G. Borner, T von Egidy, H Fujimoto, M Jentschel, H Lehmann

SEM Sentinel - SEM Performance Measurement System, Part 1

Author(s)
Alice V. Ling, Andras Vladar, Bradley N. Damazo, M A. Donmez, Michael T. Postek
This report describes the current design of a system for monitoring the performance of several major subsystems of a scanning electron microscope (SEM). The
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