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Journals

Industrial Uses of STM and AFM

Author(s)
Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to...

Hybrid Optical-Electrical Overlay Test Structure

Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor...

A Differential Wavelength Meter for Laser Tuning

Author(s)
Lowell P. Howard, Jack A. Stone Jr.
A simple interferometer for matching the wavelengths of tunable lasers is described. Our interferometer uses the angular dispersion of a diffraction grating at...

Finish Hard Turning of Powder Metallurgy M50 Steel

Author(s)
Y K. Chou, Christopher J. Evans
Finishing performance in turning of hardened powder metallurgy (PM) AISI M50 steel using cubic boron nitride (CBN) tools has been studied. Tool wear and flank...

Is Your Scanning Electron Microscope Hi-Fi?

Author(s)
Andras Vladar, Michael T. Postek, S Davilla
The scanning electron microscope (SEM) historically has been used mainly as an image-producing device and, in spite of certain obvious and sometimes serious...
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