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Industrial Uses of STM and AFM



Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka


We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications on-line in manufacturing. We also discuss the role of metrology for certain applications and briefly review many other types of SPMs besides STM and AFM. We conclude by emphasizing ultra-precision positioning, nanofabrication, and biomedical applications as important future directions in the field.
Annals CIRP


atomic force microscopy (AFM), Scanning probe microscopy (SPM), Scanning tunneling microscopy (STM)


Vorburger, T. , Dagata, J. , Wilkening, G. and Iizuka, K. (1997), Industrial Uses of STM and AFM, Annals CIRP (Accessed September 27, 2023)
Created December 31, 1996, Updated October 12, 2021