Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Application of Monte Carlo Simulations to Critical Dimension Metrology in a SEM

Published

Author(s)

J R. Lowney
Citation
Scanning Microscopy
Volume
10
Issue
3

Citation

Lowney, J. (1996), Application of Monte Carlo Simulations to Critical Dimension Metrology in a SEM, Scanning Microscopy (Accessed February 27, 2024)
Created December 31, 1996, Updated February 17, 2017