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Journals

Application of Transmission Electron Detection to SCALPEL Mask Metrology

Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, J Griffith, J E. Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre
Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the

Uncertainty and Dimensional Calibrations

Author(s)
Theodore D. Doiron, John R. Stoup
The calculation of uncertainty for a measurement is an effort to set reasonable bounds for the measurement result according to standardized rules. Since every

Metal Capillaries for Neutron Lenses

Author(s)
P. L. Reeder, A. J. Peurrung, D. S. Sunberg, J. J. Stoffels, Huaiyu H. Chen-Mayer, David F. Mildner, V. A. Sharov, V. S. Fokin

Application of Trasmission Electron Detection to Scalpel Mask Metrology

Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, A Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre, J Griffith
Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the
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