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Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking

Published

Author(s)

N Materer, R S. Goodman, S R. Leone
Citation
Journal of Applied Physics
Volume
83

Citation

Materer, N. , Goodman, R. and Leone, S. (1998), Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N<sub>2</sub>: Neutral kinetic energies and source gas cracking, Journal of Applied Physics (Accessed June 12, 2024)

Issues

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Created December 31, 1997, Updated October 12, 2021