Materer, N.
, Goodman, R.
and Leone, S.
(1998),
Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N<sub>2</sub>: Neutral kinetic energies and source gas cracking, Journal of Applied Physics
(Accessed December 9, 2023)
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Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking
Published
Author(s)
N Materer, R S. Goodman,
Citation
Journal of Applied Physics
Volume
83
Pub Type
Journals
Citation
Created December 31, 1997, Updated October 12, 2021