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We have implemented a kinetic Monte-Carlo (KMC) simulation to study the morphologies of Si (111) surfaces etched in NHF. Although our initial simulations...
Ronald G. Dixson, Richard A. Allen, William F. Guthrie, Michael W. Cresswell
The use of critical dimension atomic force microscopes (CD-AFMs) in semiconductor manufacturing, both for process control and as a reference metrology tool, is...
Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu, Ronald G. Dixson, C Nguyen, Jayaraman Raja
Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared...
John S. Villarrubia, Andras Vladar, Michael T. Postek
The semiconductor electronics industry places significant demands upon secondary electron imaging to obtain dimensional measurements that are used for process...
Instrumentation and metrology are integral to the emerging nanotechnology enterprise, and have been identified by the U. S. National Nanotechnology Initiative...
Compact, time-harmonic, acoustic sources produce waves that decay too slowly to be square-integrable on a line away from the sources. We introduce an inner...
Jun-Feng Song, Li Ma, Eric P. Whitenton, Theodore V. Vorburger
Autocorrelation and cross-correlation functions are proposed for 2D and 3D surface texture comparisons. At the maximum correlation point of the two correlated...
Elizabeth A. Wilder, Shu Guo, Martin Chiang, Christopher Stafford
A metrology for rapidly measuring the modulus of ultra-soft polymer networks has been developed. The method utilizes compression-induced buckling of a sensor...
Weiping Zhang, Michael J. Fasolka, Alamgir Karim, Eric J. Amis
Laboratory Research Informatics Systems (LRIS) hold great promise in streamlining research generally, and are particularly necessary for new data-intensive...
A combinatorial approach to the edge delamination test was carried out to obtain the failure map of the epoxy/glass bond joint as a function of both temperature...
Incorporating discrete cell adhesion motifs onto substrates in a defined orientation with variable spacing and increasing concentration offers a robust strategy...
We have been able to observe two new magnetic phases of ultrathin Co by growing atomically well ordered Co films on cleaved GaAs(110) substrates. For a Co...