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Journals

Advances in Radiated EMC Measurement Techniques

Author(s)
Perry F. Wilson
Recent research on radiated electromagnetic compatibility measurement techniques is reviewed. The focus is on both widely used methods (open area test site...

Traceable Pico-Meter Level Step Height Metrology

Author(s)
Ndubuisi G. Orji, Ronald G. Dixson, Joseph Fu, Theodore V. Vorburger
The atomic force microscope (AFM) increasingly being used as a metrology tool in the semiconductor industry where the features measured are at the nanometer...

Internet-Based Surface Metrology Algorithm Testing System

Author(s)
Son H. Bui, Thomas B. Renegar, Theodore V. Vorburger, Jayaraman Raja, Mark C. Malburg
This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools...

Chip-Scale Atomic Magnetometers

Author(s)
P Schwindt, Svenja A. Knappe, V Shah, Leo W. Hollberg, John E. Kitching, Li-Anne Liew, John M. Moreland
Using the techniques of micro-electro-mechanical systems, we have constructed a small, low-power magnetic sensor based on alkali atoms. We use a coherent...
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