Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Line Edge Roughness Metrology Using Atomic Force Microscopes



Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu, Ronald G. Dixson, C Nguyen, Jayaraman Raja


Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths each instrument was able to measure were also compared. Techniques on checking the noise level of LER measuring instruments are highlighted.
Measurement Science & Technology


atomic force microscope, carbon nanotube, line edge roughness


Orji, N. , Vorburger, T. , Fu, J. , Dixson, R. , Nguyen, C. and Raja, J. (2005), Line Edge Roughness Metrology Using Atomic Force Microscopes, Measurement Science & Technology, [online], (Accessed May 23, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created January 1, 2005, Updated April 10, 2019