Line Edge Roughness Metrology Using Atomic Force Microscopes
Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu, Ronald G. Dixson, C Nguyen, Jayaraman Raja
Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths each instrument was able to measure were also compared. Techniques on checking the noise level of LER measuring instruments are highlighted.
, Vorburger, T.
, Fu, J.
, Dixson, R.
, Nguyen, C.
and Raja, J.
Line Edge Roughness Metrology Using Atomic Force Microscopes, Measurement Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823182
(Accessed December 1, 2023)