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Line Edge Roughness Metrology Using Atomic Force Microscopes

Published

Author(s)

Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu, Ronald G. Dixson, C Nguyen, Jayaraman Raja

Abstract

Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths each instrument was able to measure were also compared. Techniques on checking the noise level of LER measuring instruments are highlighted.
Citation
Measurement Science & Technology
Volume
16

Keywords

atomic force microscope, carbon nanotube, line edge roughness

Citation

Orji, N. , Vorburger, T. , Fu, J. , Dixson, R. , Nguyen, C. and Raja, J. (2005), Line Edge Roughness Metrology Using Atomic Force Microscopes, Measurement Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823182 (Accessed May 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2005, Updated April 10, 2019