TY  - JOUR
AU  - Ndubuisi Orji
AU  - Theodore Vorburger
AU  - Joseph Fu
AU  - Ronald Dixson
AU  - C Nguyen
AU  - Jayaraman Raja
C2  - Measurement Science & Technology
DA  - 2005-01-01
LA  - en
M1  - 16
PB  - Measurement Science & Technology
PY  - 2005
TI  - Line Edge Roughness Metrology Using Atomic Force Microscopes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823182
ER  -