@article{95336, author = {Ndubuisi Orji and Theodore Vorburger and Joseph Fu and Ronald Dixson and C Nguyen and Jayaraman Raja}, title = {Line Edge Roughness Metrology Using Atomic Force Microscopes}, year = {2005}, number = {16}, month = {2005-01-01}, publisher = {Measurement Science & Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823182}, language = {en}, }