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In August 1994, the National Institute of Standards and Technology (NIST) held a workshop for industry leaders to address the question of the need for systems
The increasing focus on design for manufacturability (DFM) in research in concurrent engineering design is expanding the scope of traditional design activities
Theodore V. Vorburger, K Yee, Brian R. Scace, F Rudder
The automated control of machine-tool accuracy is discussed based on a quality architecture containing three control loops: real-time, process-intermittent, and
T Mcwaid, Theodore V. Vorburger, Joseph Fu, Jun-Feng Song, Eric P. Whitenton
Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric
Michael T. Postek, J R. Lowney, Andras Vladar, William J. Keery, Egon Marx, Robert D. Larrabee
This work provides an approach to improved x?ray mask linewidth metrology and a more precise edge location algorithm for measurement of feature sizes on x?ray
Steven D. Phillips, Bruce R. Borchardt, Gregory W. Caskey, David E. Ward, Bryon S. Faust, Daniel S. Sawyer
NIST is currently developing equipment and techniques to rapidly access the performance of Coordinate Measuring machines (CMMs). This will allow the frequent
Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is an efficient, sensitive method for characterizing semiconductor surfaces. In addition, TOF-SIMS can
Dimensional analysis is used to examine heat transfer from flames to vertical surfaces. Configurations include a line fire against a wall, a square burner flame
R A. Dobbins, George W. Mulholland, Nelson P. Bryner
Optical cross-sections of carbonaceous aggregates (smoke) formed by combustion sources have been computed based on fractal concepts. Specific extinction depends
An improvement of the coefficient of performance (COP) of the refrigeration cycle can be realized when temperature profiles of the refrigerant mixture and the
M Y. Choi, Anthony Hamins, George W. Mulholland, Takashi Kashiwagi
The performance of a three-wavelength optical probe technique for measuring soot volume fraction and temperature was assessed by conducting experiments in the