Slaughter, J.
, Schulze, D.
, Hillis, C.
, Mirone, A.
, Stalio, R.
, Watts, R.
, Tarrio, C.
, Lucatorto, T.
, Krumrey, M.
, Mueller, P.
and Falco, C.
(1994),
Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,, Journal of Applied Physics
(Accessed March 13, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,
Published
Author(s)
J M. Slaughter, D W. Schulze, C R. Hillis, A Mirone, R Stalio, , , , Michael Krumrey, P Mueller, C M. Falco
Citation
Journal of Applied Physics
Volume
76
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1993, Updated October 12, 2021