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Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,

Published

Author(s)

J M. Slaughter, D W. Schulze, C R. Hillis, A Mirone, R Stalio, R N. Watts, Charles Tarrio, Thomas B. Lucatorto, Michael Krumrey, P Mueller, C M. Falco
Citation
Journal of Applied Physics
Volume
76

Citation

Slaughter, J. , Schulze, D. , Hillis, C. , Mirone, A. , Stalio, R. , Watts, R. , Tarrio, C. , Lucatorto, T. , Krumrey, M. , Mueller, P. and Falco, C. (1994), Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,, Journal of Applied Physics (Accessed July 22, 2024)

Issues

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Created December 31, 1993, Updated October 12, 2021