@article{784706,
  author = {J Slaughter and D Schulze and C Hillis and A Mirone and R Stalio and R Watts and Charles Tarrio and Thomas Lucatorto and Michael Krumrey and P Mueller and C Falco},
  title = {Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,},
  year = {1994},
  number = {76},
  month = {1994-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}