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Conferences

Electrical Test Structures Replicated in Silicon-on-Insulator Material

December 31, 1996

Author(s)

Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A. Allen, Loren W. Linholm, John S. Villarrubia

Analysis of Fixed-Fixed Beam Test Structures

December 31, 1996

Author(s)

Janet M. Cassard, David T. Read, Michael Gaitan

Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon

December 31, 1996

Author(s)

David T. Read, Janet M. Cassard

Time-Dependent Dielectric Breakdown of Intrinsic SiO₂ Films Under Dynamic Stress

December 31, 1996

Author(s)

P Chaparala, John S. Suehle, C. Messick, M. Roush

Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon

December 31, 1996

Author(s)

Joseph Kopanski, Jay F. Marchiando, J R. Lowney

Natural Convection from an Array of Electronic Packages Mounted on a Horizontal Board in a Narrow Aspect Ratio Enclosure

December 31, 1996

Author(s)

V. H. Adams, Yogendra K. Joshi, David L. Blackburn

Hybrid Optical-Electrical Overlay Test Structure

December 31, 1996

Author(s)

Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, William F. Guthrie, A. W. Gurnell

MOCVD of SnO₂ on Silicon Microhotplate Arrays for Use in Gas Sensing Applications

December 31, 1996

Author(s)

F. DiMeo, Stephen Semancik, Richard E. Cavicchi, John S. Suehle, P Chaparala, N. H. Tea

Assessing MOS Gate Oxide Reliability on Wafer Level with Ramped/Constant Voltage and Current Stress

December 31, 1996

Author(s)

A. Martin, John S. Suehle, P Chaparala, P. O'Sullivan, A. Mathewson, C. Messick

Temperature-Modulated Micro-Hotplate Gas Sensors

December 31, 1996

Author(s)

Richard E. Cavicchi, Stephen Semancik, F. DiMeo, John S. Suehle, N. H. Tea, K. G. Krieder, P Chaparala, Michael Gaitan

Real-Time Thermal Infrared Scene Generation Technology and Its Application in the Test and Calibration of Infrared Sensors and Seekers

December 31, 1996

Author(s)

R. B. Johnson, R. Chung, Michael Gaitan

High-Accuracy Critical-Dimension Metrology Using a Scanning Electron Microscope

December 31, 1996

Author(s)

J R. Lowney, Andras Vladar, Michael T. Postek

A New Oxide Degradation Mechanism for Stresses in the Fowler-Nordheim Tunneling Regime

December 31, 1996

Author(s)

A. Martin, John S. Suehle, P Chaparala, P. O'Sullivan, A. Mathewson

Micromachined Thermocouple Microwave Detector in CMOS Technology

December 31, 1996

Author(s)

V. Milanovic, Michael Gaitan, Mona E. Zaghloul

Use of Pressure for Quantum-Well Band-Structure Characterization

December 31, 1996

Author(s)

John H. Burnett, Paul M. Amirtharaj, H. M. Cheong, W. Paul, E. S. Koteles, B. Elman

Development of Thin-Film Multijunction Thermal Converters at NIST

December 31, 1996

Author(s)

Joseph R. Kinard Jr., Donald B. Novotny, Thomas E. Lipe Jr., D. X. Huang

Intelligent Manufacturing System Control: Reference Model and Initial Implementation

December 13, 1996

Author(s)

Hui-Min Huang

Control, Robotics & Intelligent Systems

Understanding and Controlling Particle Growth

December 9, 1996

Author(s)

Michael R. Zachariah

Calibration Comparison Method for Vector Network Analyzers

December 1, 1996

Author(s)

Roger Marks, Jeffrey A. Jargon, John R. Juroshek

We present a technique for comparing the scattering parameter measurements made with respect to two vector network analyzer calibrations. This method determines...

Cleanrooms in Analytical Chemistry, Past, Present, and Future

December 1, 1996

Author(s)

J R. Moody

Calibration in Multiconductor Transmission Lines

December 1, 1996

Author(s)

Dylan F. Williams

Abstract: This paper presents a calibration and measurement method for circuits embedded in lossy printed multiconductor transmission lines. The experimental...