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In-Chamber Thermometry Calibration using a Silicon Proof-Wafer

Published

Author(s)

Benjamin K. Tsai, Francis J. Lovas, D P. DeWitt, K G. Kreider, G W. Burns, David W. Allen
Proceedings Title
5th International Conference of Advanced Thermal Processing of Semiconductors: RTP''97
Conference Dates
September 3-5, 1997
Conference Location
New Orleans, LA
Conference Title
Proc. 5th International Conference of Advanced Thermal Processing of Semiconductors: RTP'97

Citation

Tsai, B. , Lovas, F. , DeWitt, D. , Kreider, K. , Burns, G. and Allen, D. (1997), In-Chamber Thermometry Calibration using a Silicon Proof-Wafer, 5th International Conference of Advanced Thermal Processing of Semiconductors: RTP''97 , New Orleans, LA (Accessed April 22, 2024)
Created January 1, 1997, Updated February 17, 2017