@conference{124291,
  author = {Benjamin Tsai and Francis Lovas and D DeWitt and K Kreider and G Burns and David Allen},
  title = {In-Chamber Thermometry Calibration using a Silicon Proof-Wafer},
  year = {1997},
  month = {1997-01-01},
  publisher = {5th International Conference of Advanced Thermal Processing of Semiconductors: RTP''97 , New Orleans, LA},
  language = {en},
}