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Conferences

Pitch and Step Height Measurements Using NIST

Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger, Edwin R. Williams, X Wang
The use of the atomic force microscope (AFM) for step height and pitch measurements in industrial applications is rapidly increasing. To compare the results

Calibration Comparison Method for Vector Network Analyzers

Author(s)
Roger Marks, Jeffrey A. Jargon, John R. Juroshek
We present a technique for comparing the scattering parameter measurements made with respect to two vector network analyzer calibrations. This method determines
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