Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

Multivariant Measurement for Thin Film Adhesion as a Function of Temperature and Thin Film Thickness

May 1, 2003

Author(s)

Martin Y. Chiang, R Song, Alamgir Karim, Eric J. Amis

The next generation of electronic components will require new low-k dielectrics or other novel thin films in the sub-micron level to be integrated into their...

Better Conformance Testing Through Automation: A Software-Based Approach to Creating Conformance Tests for W3C XML Schema

May 1, 2003

Author(s)

John M. Tebbutt

This paper describes our experiences in developing a highly configurable, extensible, component-based tool for the creation of conformance tests for XML...

Evaluating the Evaluation: A Case Study Using the TREC 2002 Question Answering Track

May 1, 2003

Author(s)

Ellen M. Voorhees

Evaluating competing technologies on a common problem set is a powerful way to improve the state of the art and hasten technology transfer. Yet poorly designed...

Network Provisioning as a Game Against Nature

May 1, 2003

Author(s)

Vladimir V. Marbukh

Traditional approaches to network provisioning assume availability of the reliable estimates for the expected demands. This assumption, however, oversimplifies...

On Shortest Random Walks under Adversarial Uncertainty

May 1, 2003

Author(s)

Vladimir V. Marbukh

Finding shortest feasible paths in a weighted graph has numerous applications including admission and routing in communication networks. This paper discusses a...

The Effect of Delay Mismatch in MPLS Networks Using 1+1 Protection

May 1, 2003

Author(s)

David W. Griffith, Sanghun Lee, L Krivulina

High-capacity optical-fiber backbone networks protect information flows belonging to their premium customers by routing two copies of the customer's data over...

Low-Electron-Energy Cathodoluminescence Study of Polishing and Etching Effects on the Optical Properties of Bulk Single-Crystal Gallium Nitride

May 1, 2003

Author(s)

Lawrence H. Robins, B W. Steiner, Norman A. Sanford, C Menoni

Low electron energy cathodoluminescence (LEECL) was used to examine polishing-induced damage in a bulk high-pressure grown GaN single-crystal platelet. The Ga...

Phase Field Modelling of Alloy Polycrystals

May 1, 2003

Author(s)

James A. Warren, I Loginova, L Granasy, T Borzsonyi, T Pusztai

Recent results using a phase field model of polycrystalline alloy dynamics are presented, using two numerical techiques: adaptive grids and parallel grids. The...

Three Dimensional Phase Field Modeling of Binary Eutectics

May 1, 2003

Author(s)

D J. Lewis, William J. Boettinger, James A. Warren

A multi-phase field model was used to study the three-dimensional dynamics of morphology evolution in binary eutectics. Performing the calculations in three...

Using LSM to Investigate Maleated Polypropylene in Polypropylene/Glass Bead Composites

May 1, 2003

Author(s)

J Toke, J D. Muzzy, Marcus T. Cicerone

For several decades maleated polypropylene (mPP) has been blended with polypropylene (PP) in an effort to improve the adhesion of PP to composite reinforcements...

Simulation of Droplet Breakup Using a Lattice Boltzmann Method

May 1, 2003

Author(s)

Frederick R. Phelan Jr., Nicos Martys

Droplet breakup in homogeneous shear flow at super critical Capillary numbers and a viscosity ratio of unity is studied using a lattice Boltzmann method. We...

Flow Induced Coating of Polymer Processing Additives: Development of Frustrated Total Internal Reflection Imaging

May 1, 2003

Author(s)

S B. Kharchenko, Kalman D. Migler, P M. McGuiggan

In the extrusion of polyethylene (PE), fluoropolymer-processing additives (PPA) are used to eliminate the surface defect known as sharkskin by coating the die...

PIV Measurements in a Droplet-Laden Homogeneous Turbulent Flow Over a Cylinder

May 1, 2003

Author(s)

Cary Presser, G Papadopoulos, J F. Widmann

The dispersal of high boiling point liquid fire suppression agents around solid obstacles is investigated to obtain a better understanding of the physical...

A Simulation Study of Repeatability and Bias in the CD-SEM

May 1, 2003

Author(s)

John S. Villarrubia, Andras Vladar, Michael T. Postek

The ability of a critical dimension scanning electron microscope (CD-SEM) to resolve differences in the widths of two lines is determined by measurement...

Recent Developments in Standards for Measurement Uncertainty and Traceability

May 1, 2003

Author(s)

Steven D. Phillips

This paper examines recent and future work of the B89.7 and ISO 14253 series of standards. Other recent online information on measurement uncertainty and...

Implementation of a Reference Measurement System Using CD-AFM

May 1, 2003

Author(s)

Ronald G. Dixson, Theodore V. Vorburger, Angela Guerry, Marylyn H. Bennett, B Bunday

International SEMATECH (ISMT) and the National Institute of Standards and Technology (NIST) are working together to improve the traceability of atomic force...

Calibration Strategies for Overlay and Registration Metrology

May 1, 2003

Author(s)

Richard M. Silver, Michael T. Stocker, Ravikiran Attota, M R. Bishop, Jay S. Jun, Egon Marx, M P. Davidson, Robert D. Larrabee

Critical dimensions in current and next generation devices are driving the need for tighter overlay registration tolerances and improved overlay metrology tool...

Potentials for High-Pressure/Environmental SEM Microscopy for Photomask Dimensional Metrology

May 1, 2003

Author(s)

Michael T. Postek, Andras Vladar, T Rice, R Knowles

Binary and phase-shifting chromium on quartz optical photomasks have been successfully investigated with high-pressure/environmental scanning electron...

Measurement Uncertainty and Traceability Issues in National and International Measurements

May 1, 2003

Author(s)

Steven D. Phillips

This paper discusses some recent laboratory intercomparisons with emphasis on the success of the uncertainty statement to include the reference value. Some...

Metrics and Metrology for FPDs

May 1, 2003

Author(s)

Edward F. Kelley

We review various methods for making optical measurements of flat panel displays (FPDs). In particular, the measurements outlined in the VESA FPDM2 will be...

Database-Assisted Design and Structural Reliability for Building Codes

May 1, 2003

Author(s)

S M. Diniz, Emil Simiu

We present a database-assisted design (DAD)-compatible probabilistic procedure for estimating (a)wind effects for any return period and (b) wind load factors...

The IEEE Standard on Transitions, Pulses, and Related Waveforms, Std-181

May 1, 2003

Author(s)

Nicholas Paulter, Donald R. Larson, Jerome J. Blair

The IEEE has revised the now withdrawn IEEE standards on pulse techniques and definitions. This revision includes adding and deleting definitions, clarifying...

Luminance probes for contrast measurements in medical displays

May 1, 2003

Author(s)

Aldo Badano, Scott Pappada, Edward F. Kelley, Michael J. Flynn, Sandrine Martin, Jerzy Kanicki

We report on a comparative study that examines four conic luminance probes in their ability to measure small-spot display contrast. We performed linear scans of...

New Method to Enhance Overlay Tool Performance

May 1, 2003

Author(s)

Ravikiran Attota, Richard M. Silver, Michael T. Stocker, Egon Marx, Jay S. Jun, M P. Davidson, Robert D. Larrabee

New methods to enhance and improve algorithm performance and data analysis are being developed at NIST for overlay measurement applications. Both experimental...

Techniques to Improve the Performance of TCP in a Mixed Bluetooth and WLAN Environment

May 1, 2003

Author(s)

Nada T. Golmie, O Rebala

A major challenge for the WLAN technology stems from having to share the 2.4 GHz ISM band with other wireless devices such as Bluetooth radios. The main goal of...

The ebXML Test Framework and the Challenges of B2B Testing

May 1, 2003

Author(s)

J Durand, Michael J. Kass, P Wenzel

Testing tools for Conformance and Interoperability are emerging as a key technology for enabling and maintaining interoperability between e-Business partners...

Manufacturing Interoperability

May 1, 2003

Author(s)

Steven R. Ray, Albert T. Jones

As manufacturing and commerce become ever more global in nature, companies are increasingly dependent upon the efficient and effective exchange of information...

Subnanometer Wavelength Metrology of Lithographically Prepared structures: A Comparison of Neutron and X-Ray Scattering

May 1, 2003

Author(s)

D Casa, R Jones, Theodore V. Vorburger, Ndubuisi George Orji, G Barclay, P Bolton, W Wu, E Lin, T Hu

The challenges facing current metrologies based on SEM, AFM, and light scatterometry for technology nodes of 157 nm imaging and beyond suggest that the...

Electron Beam Metrology of 193 nm Resists at Ultra Low Voltage

May 1, 2003

Author(s)

N. Sullivan, Ronald G. Dixson, B Bunday, M Mastovich, P Knutruda, P Fabre, R Brandoma

Resist slimming under electron beam exposure introduces significant measurement uncertainty in the metrology of 193 nm resists. Total critical dimension (CD)...

Overlay Metrology Simulations: Analytical and Experimental Validations

May 1, 2003

Author(s)

Joel L. Seligson, B Golovanevsky, J M. Poplawski, M E. Adel, Richard M. Silver

We have previously reported on an overlay metrology simulation platform, used for modeling both the effects of overlay metrology tool behavior and the impact of...

Was this page helpful?